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Information × Registration Number 0108U009663, ( 0212U006258  ) R & D request Title Development of technology manufacturing SiGe and Si layers by means LP CVD methods (low pressure chemical vapor deposition) for silicon monolitic microwave integrated circuits (MMIC)I Head Сидоренко Володимир Павлович, Registration Date 29-10-2008 Organization State Scientific Institution “Institute for Single Crystals” of National Academy of Sciences of Ukraine popup.description1 popup.nrat_date 2024-12-10 Close
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Development of technology manufacturing SiGe and Si layers by means LP CVD methods (low pressure chemical vapor deposition) for silicon monolitic microwave integrated circuits (MMIC)I
Head: Сидоренко Володимир Павлович. Development of technology manufacturing SiGe and Si layers by means LP CVD methods (low pressure chemical vapor deposition) for silicon monolitic microwave integrated circuits (MMIC)I. State Scientific Institution “Institute for Single Crystals” of National Academy of Sciences of Ukraine. № 0108U009663
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Updated: 2026-03-21


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