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Information × Registration Number 0108U009822, R & D request Title Development of compact RF diode reactor with distributed gas feeding and pumping for plasma-chemical etching processes with high uniformity. Head Дудін Станіслав Валентинович, Registration Date 13-11-2008 Organization V.N. Karazin Kharkiv National University popup.description1 popup.nrat_date 2024-12-10 Close
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Development of compact RF diode reactor with distributed gas feeding and pumping for plasma-chemical etching processes with high uniformity.
Head: Дудін Станіслав Валентинович. Development of compact RF diode reactor with distributed gas feeding and pumping for plasma-chemical etching processes with high uniformity.. V.N. Karazin Kharkiv National University. № 0108U009822
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Updated: 2026-03-23


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