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Information × Registration Number 0109U004406, ( 0210U005233  ) R & D request Title Study of doping characteristics of hard planar sources of the boron and phosphorus, developed on thermostats silicon substrate Head Островський Ігор Петрович, Registration Date 04-06-2009 Organization Lviv Polytechnic National University popup.description1 popup.nrat_date 2024-12-10 Close
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Study of doping characteristics of hard planar sources of the boron and phosphorus, developed on thermostats silicon substrate
Head: Островський Ігор Петрович. Study of doping characteristics of hard planar sources of the boron and phosphorus, developed on thermostats silicon substrate. Lviv Polytechnic National University. № 0109U004406
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Updated: 2026-03-23


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