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Information × Registration Number 0109U005592, ( 0210U001491  ) R & D request Title Vacuum-plasma module for the technological complex of making of nanoelectronics and microenergy element base Head Руденко Едуард Михайлович, Registration Date 17-06-2009 Organization G. V. Kurdyumov IMPh of the N.A.S.U. popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Руденко Едуард Михайлович. Vacuum-plasma module for the technological complex of making of nanoelectronics and microenergy element base. G. V. Kurdyumov IMPh of the N.A.S.U.. № 0109U005592
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Updated: 2026-03-22