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Information × Registration Number 0110U002462, ( 0211U009423  ) R & D request Title Design processing technique of reception focused films of nitride aluminium with piezoelectric properties for organization functional MEMS-structures in nanoelectronic meshes. Head Якименко Юрій Іванович, Registration Date 26-02-2010 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-10 Close
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Design processing technique of reception focused films of nitride aluminium with piezoelectric properties for organization functional MEMS-structures in nanoelectronic meshes.
Head: Якименко Юрій Іванович. Design processing technique of reception focused films of nitride aluminium with piezoelectric properties for organization functional MEMS-structures in nanoelectronic meshes.. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0110U002462
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Updated: 2026-03-29


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