Information × Registration Number 0110U004115, ( 0212U008802 ) R & D request Title Design of the proton lithography unit with submicron resolution. Head Пономарьов Олександр Георгійович, Registration Date 29-06-2010 Organization Institute of Applied Physics, NAS of Ukraine popup.description1 popup.nrat_date 2024-12-10 Close
Head: Пономарьов Олександр Георгійович. Design of the proton lithography unit with submicron resolution..
Institute of Applied Physics, NAS of Ukraine. № 0110U004115