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Information × Registration Number 0110U006589, R & D request Title Technologies of formation of modern semiconductor SiC, AlN films for microelectronics and optoelectronics applications Head Perekrestov Vyacheslav Ivanoviyh, Доктор технічних наук Registration Date 11-11-2010 Organization Sumy State University popup.description1 popup.nrat_date 2024-12-10 Close