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Information × Registration Number 0111U001005, ( 0213U005113  0213U005350  0214U002551  ) R & D request Title Low-temperature obtaining of silicon carbide films with preset properties meant for electronics and optoelectronics Head Семенов Олександр Володимирович, Registration Date 11-01-2011 Organization Institute for single crystals NASU popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Семенов Олександр Володимирович. Low-temperature obtaining of silicon carbide films with preset properties meant for electronics and optoelectronics. Institute for single crystals NASU. № 0111U001005
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Updated: 2026-03-26