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Information × Registration Number 0111U010547, ( 0212U004371  ) R & D request Title Technologies of formation of modem semicounductor SiC, AlN films for microelectronics and optoelectronics Head Перекрестов В"ячеслав Іванович, Registration Date 28-12-2011 Organization Sumy State University popup.description1 popup.nrat_date 2024-12-10 Close