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Information × Registration Number 0112U004115, ( 0212U005686  ) R & D request Title "Development of interferential nanolithography methods for formation of relief-phase structures by using of vacuum photoresists" 3 stage -"Development and research of interference photolithography of semiconductor wafers" Head Indutnyi Ivan , Доктор фізико-математичних наук Registration Date 27-04-2012 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close