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Information × Registration Number 0113U001490, ( 0214U001398  ) R & D request Title The development of plasma nanotechnology of the nanostructured aluminium and boron nitrides layers deposition for microwave devices surface protection Head Заяць Микола Сергійович, Registration Date 21-02-2013 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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The development of plasma nanotechnology of the nanostructured aluminium and boron nitrides layers deposition for microwave devices surface protection
Head: Заяць Микола Сергійович. The development of plasma nanotechnology of the nanostructured aluminium and boron nitrides layers deposition for microwave devices surface protection. V. Lashkaryov Institute of semiconductor physics. № 0113U001490
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Updated: 2026-03-26


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