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Information × Registration Number 0113U005528, R & D request Title The formation of thermally stable nanoscaled NiSI silicide films on syngle crystalline silicon Head Макогон Юрій Миколайович, Registration Date 11-07-2013 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-10 Close