1 documents found
Information × Registration Number 0114U004124, ( 0215U000163  0216U005826  ) R & D request Title Formation and properties of Si/SiO2/Si geterostructures with Si nanoclusters buried in dielectric film: experiment, modelling and carbon influence Head Литовченко Володимир Григорович, Registration Date 22-05-2014 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
search.res_rk
Formation and properties of Si/SiO2/Si geterostructures with Si nanoclusters buried in dielectric film: experiment, modelling and carbon influence
Head: Литовченко Володимир Григорович. Formation and properties of Si/SiO2/Si geterostructures with Si nanoclusters buried in dielectric film: experiment, modelling and carbon influence. V. Lashkaryov Institute of semiconductor physics. № 0114U004124
1 documents found

Updated: 2026-03-26


Роздрукувати цю сторінку