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Information × Registration Number 0116U005846, ( 0220U101982  ) R & D request Title Study of the Processes in Proton Beam Lithography for Production of 3D structures for X-ray Optics Element Fabrication. Head Ponomarev Alexander H., Доктор фізико-математичних наук Registration Date 29-12-2016 Organization Institute of Applied Physics, NAS of Ukraine popup.description1 popup.nrat_date 2024-12-10 Close