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Information × Registration Number 0117U004875, ( 0219U100595  0219U100597  ) R & D request Title The technology of forming the vacuum-plasma structural components for nanoelectronics Head Bazhyn Anatolij I., Доктор фізико-математичних наук Registration Date 06-03-2017 Organization Scientific Center of Physical Technologies popup.description1 popup.nrat_date 2024-12-10 Close