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Information × Registration Number 0117U007245, ( 0218U003670  ) R & D request Title Production technology of silicon micro- and nanostructures with high aspect ratio Head Коваль Вікторія Михайлівна, Registration Date 02-11-2017 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-10 Close
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Production technology of silicon micro- and nanostructures with high aspect ratio
Head: Коваль Вікторія Михайлівна. Production technology of silicon micro- and nanostructures with high aspect ratio. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0117U007245
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Updated: 2026-03-23


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