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Information × Registration Number 0119U101491, ( 0220U101253  ) R & D request Title Creation and testing of modified magnetron for deposition of new functional nanomaterials Head Vasyn Andrii V., Доктор фізико-математичних наук Registration Date 18-04-2019 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 Manufacturing and examination of an experimental magnetron unit with a controlled degree of imbalance of the magnetic system based on the universal vacuum post VUP-5. popup.nrat_date 2024-12-10 Close