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Information × Registration Number 0120U101035, ( 0225U001670  ) R & D request Title Beam formation in high-resolution proton beam writing facility. Head Ponomarov Oleksandr H., Доктор фізико-математичних наук Registration Date 26-02-2020 Organization Institute of Applied Physics National Academy of Sciences of Ukraine popup.description1 The objective of the work is development of probe-forming systems with aberration correction for the proton-beam writing for enhancing their resolution through zooming out the beam to <10 nm. popup.nrat_date 2024-12-10 Close