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Information × Registration Number 0120U104287, ( 0221U104794  ) R & D request Title Development and fabrication of automated system for sample positioning, unballansing magnet system, and optimisation of driving units for vacuum deposition process for goals of nanotechnologies and microelectronics. Stage 1. Development of technical documentation, fabrication and installation of drivung units for deposition process. Head Vasin Andrii V., Доктор фізико-математичних наук Registration Date 16-10-2020 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 Development of technical documentation, fabrication and installation of drivung units for deposition process. popup.nrat_date 2024-12-10 Close
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Head: Vasin Andrii V.. Development and fabrication of automated system for sample positioning, unballansing magnet system, and optimisation of driving units for vacuum deposition process for goals of nanotechnologies and microelectronics. Stage 1. Development of technical documentation, fabrication and installation of drivung units for deposition process.. V. Lashkaryov Institute of semiconductor physics. № 0120U104287
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Updated: 2026-03-27