Search academic texts

Information × Registration Number 0122U000571, ( 0222U002946  ) R & D request Title Development and manufacture of an automated positioning system for samples, a mechanism for unbalancing the magnetic field of the magnetron and optimization of control devices for the process of vacuum deposition for nanotechnology and microelectronics Stage 2: "Production of the mechanism for moving the unbalancing magnet and development of design documentation for the scanning sample holder Head Vasin Andrii V., д.ф.-м.н. Registration Date 24-01-2022 Organization VE Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine popup.description1 Manufacturing and installation on VUP-5 at the Institute of Semiconductor Physics. V.Ye. Lashkaryova NASU mechanism of automatic vertical movement of the unbalancing magnet of magnetron. Develop a general concept and design documentation for the sample holder (table) with a mechanism for controlled movement in direction and speed in two coordinates in the horizontal plane. popup.nrat_date 2024-12-09 Close