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Information × Registration Number 0126U001037, R & D request Title Physical principles of improving the synthesis of nanostructured objects using magnetron discharge and vacuum-arc technology Head Igor B. Denysenko, д.ф.-м.н. Registration Date 30-01-2026 Organization Karazin University popup.description1 The goal of the project is to develop new physical foundations of technological plasma of magnetron and vacuum-arc discharges to improve the synthesis processes of nanostructured objects suitable for application in various industries. To achieve this goal, the following main tasks are planned: - to modify the magnetron sputtering system by organizing a non-independent glow discharge in the chamber volume to increase the degree of ionization of the evaporated substance; - to develop a diagnostic complex for studying plasma parameters, ensuring automation of measurements; - to experimentally determine the effect of the parameters of the magnetron discharge plasma and the energy of ions on the substrate on the phase composition and morphology of deposited coatings based on W, Ta, Ti and Cr; - on the base of the obtained experimental and theoretical results, to determine the optimal conditions for the synthesis of nanostructured coatings; - to deposit these coatings by the vacuum-arc method with controlled plasma energetic parameters; - to conduct a comprehensive structural and phase analysis of the obtained coatings using XRD, SEM, TEM and EDS methods, to investigate the morphology and nanostructure of multilayer and multicomponent architectures, and to determine their operational characteristics; - to formulate proposals for adjusting the technological process of coating deposition to optimize the structural and phase state of the coatings for specific operating conditions; - to develop theoretical and numerical models of the magnetron discharge, taking into account the heating of the working gas in collisions of discharge particles, the spatial inhomogeneity of the plasma, as well as the non-Maxwellian shape of the electron energy distribution function; - to use these models to analyze magnetron discharge and processes on substrates in experiments and to provide recommendations for choosing optimal external conditions for the formation of nanoobjects. popup.nrat_date 2026-01-30 Close