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Information × Registration Number 0200U003575, 0197U016507 , R & D reports Title The investigation of processes of the formation of discharged particles currents in ion-plasma systems with combined EH fields popup.stage_title Head Farenyk V., Registration Date 08-06-2000 Organization Kharkov National University named after V.N. Karazin popup.description2 Induction RF disharge and non-symmetrical capacitive RF discharge at low ptessure have been investigated. Ion sources (beam diameter equal 50-300 mm, ion energy equal 0?05-5 keV) have been created. They may be used for long-term manufacture application for work with chemical active gases. Low-energy plasma set-up on base of beam-plasma discharge have been created. Its discharge parameters and energy spectra of electron and ion currents have been studied. The new method of termo-ion deposition of simple and compound covering on base of beam-plasma discharge with hot cathode have been proposed. Product Description popup.authors popup.nrat_date 2020-04-03 Close