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Information × Registration Number 0201U003669, 0100U003304 , R & D reports Title Process investigation of plasma-chemical coating formation under exposure of condensation surface to charged particles popup.stage_title Head Sagalovych V.V., Registration Date 02-10-2001 Organization Kharkov National University named after V.N. Karazin popup.description2 Investigation subject: coat formation processes attained by atomization of metal targets in mixtures of inert and reaction gases. Objective: preliminary analysis of literary data on characteristic features of coat formation using the reactive method and magnetron sputtering systems, preparation of pilot equipment for testing the effect of charged particles on coat formation processes and their properties under magnetron sputtering of metal targets in mixtures of inert and reaction gases. Investigation method: analysis and generalization of experimental and theoretical research of coat formation processes by use of vacuum-plasma methods, in particular, by use of magnetron sputtering, and effect of formation environment on the coat properties. The effect of general reactive sputtering parameters by use of vacuum-plasma methods on coat properties was put under analysis. The example of Ti-N coat illustrated the possibility of its versatility and hence the requirements toward the properties, which may be co ntrollable variation of its composition, structure and other characteristics by the appropriate selection of the sputtering process parameters. The above features of reactive magnetron sputtering were investigated, as well as the investigation results, which were to solve the issue of obtaining coats with pre-determined properties and, in particular, to provide proper controllability and stability in the course of sputtering processes. Description and feasibility study of pilot schematic are provided. The schematic is to be used to investigate the effect of charged particle flows on the reactive formation processes. The schematic includes a magnetron planar sputtering system and auxiliary exciting unit to provide HF discharge in the gap between the target and the substrate. The investigation results were used to prepare pilot equipment and determine further strategies magnetron coat sputtering process investigations. Product Description popup.authors popup.nrat_date 2020-04-02 Close