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Information × Registration Number 0201U003793, 0100U003269 , R & D reports Title The study for the micro- and nanoelectronics purposes of secondary emission, adsorption and radiation processes under the bombardment of solids by medium energy ions popup.stage_title Head Koval' A.G., Registration Date 26-04-2001 Organization Kharkov National University named after V.N. Karazin popup.description2 The objects of investigations were materials with different electron structures: A3B5 group semiconductors including solid solutions of A3B5 compounds, and metal aluminium. The aim of work was to get the information about the main regularities and mechanism of secondary ion emission (SIE) from materials with different electron structures, to clear the influence on SIE of solid electron structure, electron structure of sputtered particles, the influence of submonolayer oxygen covering on physical characteristics of SIE; to study the forming of radiation defects in gallium arsenide at D+ ion bombardment. The methods of analysis were the energy-mass-spectrometry of secondary ions; thermodesorption mass-spectrometry. The energy distributions of characteristic secondary ions emitted from the surfaces of F3B5 group semiconductors and aluminium at Ar+ ion bombardment and the influence on them of oxygen pressure in target camera have been studied. The energy distributions for atomic ions spread from 0 up to 20 00 eV, the most probably secondary ions energies are in 10-200 eV range; at these energies there are the differences in energy spectra depending on the material. The rising of O2 pressure leads to changing that are in accordance with adsorption activity data for these materials. It was cleared that at bombardment of gallium arsenide by D+ ions beam in samples the structural defects of crystal lattice and implanted beam particles stored, the complexes of crystal lattice point defects with deuterium formed. The investigation results can be used at the creation of new materials with predetermined features, for understanding of general mechanisms of gases adsorption and creation of general theory of these processes, and in solids diagnostics on atomic level, in constructional materials science. Product Description popup.authors popup.nrat_date 2020-04-02 Close