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Information × Registration Number 0201U004774, 0197U019544 , R & D reports Title Design of the plasma-chemical reactor for thin films and coating. popup.stage_title Head Sazhnko Volodymyr Antonovych, Registration Date 19-04-2001 Organization Sceintific Center "Inststute for nuclear reaseach National Academy of sciences Ukraine popup.description2 The new type of plasmo-chemical reactor with uniformly evaporated electrode in vacuum was design. It is deposition thin films and coating from solide state and gas. Product Description popup.authors popup.nrat_date 2020-04-02 Close