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Information × Registration Number 0201U004779, 0199U001572 , R & D reports Title Physical-Chemical Bases of the Confrolled Modification of the Surface Layers Properties of Solid State under the influence of the Termal and Rapid Atomic Particles. popup.stage_title Head Shvets' Yu.O., Registration Date 19-04-2001 Organization Zaporozhye State University popup.description2 Ezperimental system for study of gas phase composition changes of heterogeneous systems under the influence of atomic particles of thermal energies was developed and created. Thermodynamic methods of analisis (method of constants and method of thermodynamic potential minimization) for simulation of the changes of solid surface chemical composition under the influence of atomic particles have been proposed. Semiempirical calculation of hydrogen interaction with clusters simulating ordered Si(100) surfaces are presented. Desorption and adsorption pathways for low monohydride and dihydride phase coverage are discussed. We have found that the desorption from Si (100)-2x1:H passes through asymmetric transitional state. Range of application - surfaces science, technology of microelectronic semiconductor devices, catalysis, kinetics of heterogeneous chemical reactions. Product Description popup.authors popup.nrat_date 2020-04-02 Close