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Information × Registration Number 0203U006149, 0100U006123 , R & D reports Title Making the layers silicon by method microzone lazer recrystallized (МLR) and study of their characteristics popup.stage_title Head Druzhinin Anatolij Olexandrovich, Registration Date 14-03-2003 Organization Lviv Polytechnic National University popup.description2 Study of influence microzone lazer recrystallized of layers polysilicon-on-insulator on morphology and microscopic structure of samples. Optimization of modes of lazer processing is organized. Explored temperature dependencies of characteristics of experimental structures with poly-Si resistors on insulating substrates within the range of the temperature 4,2-300К. Product Description popup.authors popup.nrat_date 2020-04-02 Close
R & D report
Head: Druzhinin Anatolij Olexandrovich. Making the layers silicon by method microzone lazer recrystallized (МLR) and study of their characteristics. (popup.stage: ). Lviv Polytechnic National University. № 0203U006149
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Updated: 2026-03-22