Search academic texts

Information × Registration Number 0204U000008, 0103U002208 , R & D reports Title Development of high power pulse systems and obtaining thick coatings popup.stage_title Head Yuri I. Yakimenko, Registration Date 08-01-2004 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 The physical-technological and apparatus approaches to realization of the ion thick coating technology are analyzed and the most suitable modes of high power magnetron discharge with nigh current density and high degree of sputtered atom ionization are chosen. It is shown the use of pulse magnetron systems, in which several targets surround a substrate and the magnetic field has a closed configuration, are most advisable to obtain thick coatings. The research technological unit, structure and vacuum schemes, the magnetron sputtering unit as well as two variants of the pulse power source (modulators) for supplying the high power discharges have been designed. Product Description popup.authors popup.nrat_date 2020-04-02 Close