Search academic texts

Information × Registration Number 0204U000594, 0101U004304 , R & D reports Title Development and fabrication of apparatus for part of reactive gas checking in vacuum installations of reactive magnetron sputtering. popup.stage_title Head Ptushinskii Yu.G., Registration Date 13-02-2004 Organization Institute of physics NASU popup.description2 We have developed and fabricated an experimental specimen of the device for the monitoring of the part of reactive gas (oxygen and nitrogen) and metal sputtered ions (aluminum and titanium) in reactive magnetron sputtering installations. The operation of the device is based on measurements of the own light emission by ions under control in narrow spectral intervals.5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close