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Information × Registration Number 0204U003767, 0101U008014 , R & D reports Title High Tc Superconducting Interconnection for Silicon ULSI Circuits popup.stage_title Head Goysa Sergiy Mykolayovych, Registration Date 23-04-2004 Organization Taras Shevchenko Kiev university popup.description2 The growth mode of multilayer Co film on the Si(100) surface have been determined. The growth of silicide layer on pores silicon substrait have been studied theoretically as well as experimentelly. Layer-by-layer method of sick silicide layer processing are established to give highest density of silicide grains and smoothness of outer surface.5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close