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Information × Registration Number 0206U000152, 0104U000132 , R & D reports Title Mathematical model and technology volumetric piezoelectric filters elements for monolithic МEMS-structures. popup.stage_title Head Zhujkov J. Valerij, Registration Date 16-01-2006 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Operation is devoted to examination of structures ferroelectric ceramics - semiconductor (SFS) as functional phototake up device of resonance type for definition of a position of an optical ray in the composite requirements. Such basic scientific and application results are in-process obtained: " For the first time the mathematical model of operation of resonance position pickups of a light beam is offered on the basis of structure ferroelectric ceramics - semiconductor which enables on a specified value of a working field, to width of a undercoat and a photoconductive stratum to calculate operating frequencies of a transmitter, to receive the shape of a potential distribution on a surface of an substructure (to calculate the shape of initial performance) and to define loading ability; " The circuitry of substitution which allows to receive electrical boundary conditions at analytical examination of mechanical oscillations in structures the piezoelectricity - semiconductor is offered; " Principles of build-up of resonance devices on basis SFS designed; " Requirements to substructure of ferroelectric ceramic, semiconductor films and electrodes in structures ferroelectric ceramics - semiconductor are completed; " Technological fundamentalses of manufacture of arrangements designed and explored on the basis of sandwich - structure of a semiconductor film on substructure of ferroelectric ceramic on the basis of a method of decomposition of the chelate metal-organic interconnections which ensures sufficient parallax purity of a substance and structure and allows to establish high-performance functional hybrid arrangements of critical dimensions and with the low cost price; " Experimentally efficiency of excitation of cavity oscillations of the first, second and third mode in SFS is checked; " Circuitries of excitation of oscillations with links of compensation designed; " Ratios for engineering calculations of parameters and performances of devices on basis SFS are offered. Obtained results enable to establisha new class of devices SFS on the basis of join of volumetric electromechanical oscillations in ferroelectric ceramic a substance with properties of photolayers of semiconductive materials. Waste at execution of the design expedients and techniques can be effectively used for making new gears, transformers and sensors on the basis of functional substances in electronic systems and arrangements. Practical design of devices SFS have a perspective of use at making arrangements of microelectromechanical systems (МEMS) which for today are the most actual direction in the world for the further development of the microelectronic instrumentation technologies. Product Description popup.authors popup.nrat_date 2020-04-02 Close
R & D report
Head: Zhujkov J. Valerij. Mathematical model and technology volumetric piezoelectric filters elements for monolithic МEMS-structures.. (popup.stage: ). Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI". № 0206U000152
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Updated: 2026-03-27