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Information × Registration Number 0207U000159, 0104U008842 , R & D reports Title Development of nanolithography technology and creation of the nanocized systems for the record and reading of informatio popup.stage_title Head Moskalenko Michael, Registration Date 11-01-2007 Organization The closed Joint-stock Company "Research-and-production concern "Science" popup.description2 There has been performed an analysis of present state of technological level of spraying equipment and shown that the basis for complex solving problems of forming super thin conducting and dielectric films and surfaces in some fields of nanotechnology is a method of impulse condensation of electro-erosion plasma. To achieve all the advantages of nano-technological method several problems should be solved: Optimization of conditions of local injection of plasma into discharge gap in order to increase reconstruction ability of film parameters and increase of the plasma generator resource. Determine influence of magnetic field geometry in the area where plasma flow exits generator to control parameters of film which precipitates and opportunity to use two plasma generators. Minimize losses of plasma in plasmaoptic system and increase uniformity of precipitating films. Product Description popup.authors popup.nrat_date 2020-04-02 Close