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Information × Registration Number 0207U002889, 0104U009470 , R & D reports Title Investigation and elaboration pf inorganic photolithography methods for obtaining relief microstructures on metallic and dielectric substrates of optical information carries. popup.stage_title Head Rubish V.M., Registration Date 21-02-2007 Organization Uzhgorod scientific-technological center of materials for optical information carriers Institute for Information Recording NASU popup.description2 Calculations for critical cooling rates of melts have been carried out, optimal regimes of glass synthesis have been determined. Investigation results of short-range order structure, physico-chemical, optical and mechanical parameters of glasses and films in chalcogenide systems on the basis of arsenic and antimony and their changes depending on chemical composition, conditions oa obtaining and under influence of high hydrostatic illumination pressure and annealing, are given. Compositions of inorganic photoresists and those highselective enchants which ensure obtaining of relief microstructures with micron and submicron sizes, have been determined.5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close