Search academic texts

Information × Registration Number 0207U005086, 0104U003157 , R & D reports Title Investigation of dynamics ionic-radial and of the HF discharges plasma systems in combined electrical and magnetic the fields. popup.stage_title Head Tolok Volodymyr Tarasovich, Registration Date 01-03-2007 Organization Scientific Center of Physical Technologies, Ministry of Education and Science and National Academy of Science Ukraine popup.description2 The theoretical models of plasma condenser impedance and magnetized ionic - beam plasma are created. The complex of experimental researches of the plasma-chemical etching module for formation nanostructures is carried out. Adequacy of theoretical model to experimental data is proved. Principles of technological systems construction are determined on the basis of combined HF induction-capacitor discharge and the discharge in the crossed electric and magnetic fields. Product Description popup.authors popup.nrat_date 2020-04-02 Close