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Information × Registration Number 0207U005103, 0106U000095 , R & D reports Title Development of technology reception monolithic MEMS structures on the basis of a piezoelectric films nitride of aluminium for radio-electronic devices and communication systems. popup.stage_title Head Yakimenko I. Yuri, Registration Date 02-03-2007 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Design is directed on research of volumetric micromechanical resonators on the basis of semi-conductor and dielectric substances. The mathematical model of drive of resonant fluctuations due to creation of special mechanical system and electric field is received. Requirements to piezoelectric ceramic linings, films and electrodes in structures are researched. Processing techniques of reception of amorphous and dimensional structural films of silicon and alloys on the basis of silicon are considered. The analysis of manufacturing method of improvement electronic and physical properties of films of crystal interconnections of silicon is led. Principles of creation of elements of filters on the basis of lamina of piezoelectric substances are developed. Variants of technical decisions of elements of filters are offered. Results are recommended for using by design of arrangements of a percolation of signals with operated characteristics of resonant elements. Product Description popup.authors popup.nrat_date 2020-04-02 Close