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Information × Registration Number 0208U002199, 0107U005747 , R & D reports Title Development of oxygen sensor based on film electrochemichal gas converter popup.stage_title Head Lisovsky Igor Petrovich, Registration Date 18-01-2008 Organization V.Lashkaryov Institute of Semiconductor Physics National Academy of Sciences of Ukraine popup.description2 Use of well approved microelectronic technologies for reception of elements of a planar sensor control of oxygen and studying structural and electrophysical properties of films of active ceramics (ZrО2), porous metal electrodes, and also an establishment of mechanisms of carrying over of a current at the raised temperatures through a film of active ceramics was the purpose of researches. Films of firm electrolit (ZrО2, alloyed by yttrium oxide) and porous layers Ni and Cu as functional elements of touch electronics were object of researches. For purpose achievement the IR-spectroscopy, electronic microscopy and microscopy of nuclear forces, measurement techniques of conductivity and capacity-voltage characteristic were used gravimetry. Technological conditions of reception high-quality both continuous, and porous films of semiconductors, dielectrics, metals are defined, using a method of ionic-plasma dispersion of materials at normal or sliding coal of falling of sprayed particles on a substrate. The technology of reception of elements of a breadboard model of a planar sensor control of oxygen (lambda - probe) is developed and created. The carried out researches are accompanied by detailed patent search in questions which are considered in R and D project. Results of R and D project can be used in electronic industry for creation of planar oxygen sensor controls. HETEROSTRUCTURES, SEMI-CONDUCTOR SENSOR CONTROLS, OXYGEN SENSOR CONTROLS, LAMBDA - PROBE Product Description popup.authors popup.nrat_date 2020-04-02 Close