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Information × Registration Number 0208U002944, 0107U002710 , R & D reports Title Development of the methods and performance of the measurements of the temporal dependense of the surface temperature developing during formation of metal and refractory compound films popup.stage_title Head Shaginyan Leonid Robertovich, Registration Date 29-02-2008 Organization I.N.Frantsevich Institute for Probmens of Materials Sciences Ukrainian Academy of Science popup.description2 The work is devoted to the development of the methods and measurements with their aid the surface temperature that forms during sputter deposition of Cu, Ti, Cr, TiN. The new calorimetry method for in situ surface temperature measurements has been developed. It is shown that this temperature noticeably exceeds that of the substrate and linearly increases with increasing the energy flux to the condensation surface. New mechanism of film growth based on the supposition that a liquid-like layer possessing a giant thermal resistivity forms on the condensation surface during film growth is suggested. Product Description popup.authors popup.nrat_date 2020-04-02 Close