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Information × Registration Number 0208U005792, 0107U008219 , R & D reports Title Development of high effective precision technology of cleaning a surface of thin layers of semi-conductor, dielectric and metal materials. popup.stage_title Head Virchenko P., Registration Date 29-09-2008 Organization The interbranch centre of introduction of new technologies "Eridan" popup.description2 On the basic of experimental researches was developed 6 base technological routes of cleaning of surface of semiconductors (silicon), dielectrics (oxid of silicon) and metals (aluminium alloyed poly-silicon). On these base routes are made the technological card. The double route which is based on the use of PAR-desorbent solution and peroxid ammoniac the one is most attractive from them. Product Description popup.authors popup.nrat_date 2020-04-02 Close