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Information × Registration Number 0209U002296, 0106U001574 , R & D reports Title Research of processes of formation of streams of the activated particles inclaster plasma systems for synthesis and processing of nanostructure popup.stage_title Head Farenik Volodimir Ivanovich, Registration Date 04-02-2009 Organization Kharkov national university named after V.N. Karazin popup.description2 Research object: new plasma cluster system for the reactive synthesis of complex composite structures such as oxides and oxinitrydes on the base of magnetron and RF inductive discharges. Purpose of the work: development and research of the new plasma cluster system for the reactive synthesis of complex composite structures, and physical basys of the technology of formation of composite micro- and nanostructures of oxides and oxinitrydes. Research method: probe measuring of plasma parameters, study of properties of the synthesized structures and research of their interconnection. In the report the results of development and research of the new plasma cluster system based on magnetron and RF inductive discharges for the reactive synthesis of complex composite structures are presented as well as physical basys of the technology of formation of composite micro- and nanostructures of oxides and oxinitrydes. The basic idea of the technology consists in separation of two processes: sputtering of metallic target of the DC magnetron in rare gas and activation of reactive gas by an additional plasma source on the base RF inductive discharge. During the work the URM3 installation was modernized for reactive magnetron deposition of nanocomposite dielectric coatings, complex researches of process of reactive synthesis of dielectric films of Al2O3 type were conducted as well as study of properties of the synthesized structures. Product Description popup.authors popup.nrat_date 2020-04-02 Close