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Information × Registration Number 0209U002528, 0106U002248 , R & D reports Title Development of the aluminium alloys and sources for heat and corrosional endurance of the aluminium metallization in submicron structures VLSI popup.stage_title Head Novosiadly Stepan Petrovych, Registration Date 17-02-2009 Organization Precarpathian university named after Vassyl Stefanyk popup.description2 Theoretical and experimental researches of the corrosive phenomena in thin films of aluminium alloys and metallic connection layout of top level of LSI structures were conducted in the process of work. The modern methods of research of solid state (semiconductors, metals, and dielectrics) were used for this purpose: potentiometry, X-ray photoelectron spectroscopy, reverse Rutherford scattering, x-ray diffractometry, electronography, scanning electron microscopy, method of impulsive volt-farad characteristics, Auger spectroscopy, ellipsometry, laser and optical interferometry, test control of electro-physical parameters. High-quality films of aluminium alloys were formed by the magnetron systems of target dispersion of different configurations. The reduction of contact resistances was achieved by the use of multicharge retrograde implantation of admixtures and plasmachemical profiling of contact windows. The special attention is deserved by the multicomposition magnetron systems for forming of multilevel interconnection of LSI structures with minimization of thermal and contact resistances. Product Description popup.authors popup.nrat_date 2020-04-02 Close