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Information × Registration Number 0209U002737, 0108U001310 , R & D reports Title The investigation of the effect of anomalously high temperature of the growth surface appearing during film deposition by magnetron sputtering and vacuum arc evaporation popup.stage_title Head Shaginyan Leonid Robertovich, Registration Date 13-03-2009 Organization I.N.Frantsevich Institute for Probmens of Materials Sciences Ukrainian Academy of Science popup.description2 The measurements of the temperature difference between the growth surface and the substrate were performed during magnetron sputtering and vacuum-arc evaporation of Cu, Ti, Cr, Мо. New results obtained for magnetron sputtering confirmed previous measurements. It was revealed that similar measurements are impossible for vacuum-arc evaporation method because of the presence of micro-droplets on the sample's surface. The surface roughness caused by the droplets changes the emissivity of the sample preventing calculating of the surface temperature. Anomalously high temperature of the condensation surface is explained using the idea of formation of intermediate liquid-like layer during film growth. The existence of such layer provides the temperature difference between the substrate and the growth surface. Product Description popup.authors popup.nrat_date 2020-04-02 Close