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Information × Registration Number 0209U002763, 0107U005194 , R & D reports Title Development of diagnostics methods for nanostructures in the process of production and creation of modern diagnostic laboratory for general use on their basis popup.stage_title Head Larkin Sergey, Registration Date 13-03-2009 Organization The closed Joint-stock Company "Research-and-production concern "Science" popup.description2 And prototypes of the measuring equipment of laboratory of collective use measurement procedures are developed for the control of parametres of products of microelectronics Product Description popup.authors popup.nrat_date 2020-04-02 Close