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Information × Registration Number 0209U005506, 0106U004500 , R & D reports Title Diagnostics of functional layers in the wares of micro-optics and nano-electronics, which were got electronic technologies popup.stage_title Head Vaschenko Vyacheslav Andreevich, Доктор технічних наук Registration Date 18-02-2009 Organization Cherkasy State Tehnological University popup.description2 A research object is process of diagnostics of functional layers by the method of atomic-force microscopy. A purpose of project is development of complex of equipment and methods by the method of atomic-force microscopy for diagnostics of surfaces and functional layers in optical materials which are got an electronic method. The results of survey of patent and technical literature which is devoted a study and review of parameters of surfaces of optical materials are expounded in the first division of this report. It is set as a result of review, that the method of atomic-force microscopy allows to set the real picture of microrelief of surface of the probed object with a discriminability about 0,2 nm; to conduct nanometrical researches of tribological, mechanical and operating properties of various organic and inorganic materials in the wide range of values. The second division is devoted development of physics and mathematics models of formation of functional layers in optical materials from the action of band electronic stream (thermal terms of creation of functional layers, thermal in functional layers and on a border a "functional layer - basic material"). In the third division substantive provisions over of electronic technology of receipt of functional coverages and functional layers are brought on optical materials. The developed experimental methods over of diagnosticating of functional layers on optical materials and nanometric structures of microoptics are brought in a fourth division, nano-, optoelectronics and medicine: method of study of microprofile of functional layers and nanometric elements created on optical materials the method of atomic-force microscopy; method of diagnostics of basic technically descriptions of nanometric elements with the use of sweepable atomic-force microscopy; method of determination of biological objects with the use of sweepable atomic-force microscopy. In a fifth division results over of perfection of equipment of atomic-force microscopy and making of complex are brought for diagnostics of wares of microoptics and nanoelectronics, and also results of introduction and approbation of the developed diagnostic complex in the conditions of optical production. All of researches was conducted on the developed methods with the use of method of atomic-force microscopy (NT-206V). Calculations were conducted on a modern calculable equipment. Job performances were inculcated on different of ukrainian and foreign enterprises and organizations ("SRIC of Priority technologies of the computing engineering", STE "Fotoprylad", Institute of thermal and masstransfer named of A.V.Lykov NAS of Byelorussia, Ltd "Microtestmashin" (Gomel, Byelorussia) which are engaged in planning and development of products of microoptics, integral optics, exact instrument-making, integral-optical adaptations of the special setting, and also in laboratory-research complexes which are specialized on biological and medical researches. An application of results of researches domain is a microoptics, medicineand biology, exact instrument-making. Keywords: MICROOPTICS, INTEGRAL OPTICS, NANOELECTRONICS, FUNCTIONAL LAYER, BAND ELECTRONIC STREAM, ELECTRONIC TECHNOLOGY, MICROGEOMETRY of SURFACE, ATOMIC-FORCE MICROSCOPY Product Description popup.authors popup.nrat_date 2020-04-02 Close