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Information × Registration Number 0209U005652, 0107U004904 , R & D reports Title Development of a dual-beam system of the ion microfabrication popup.stage_title Head Cherepin Valentin, Registration Date 06-03-2009 Organization Physical engineering teaching-research center popup.description2 A pair of the ion sources, plasma source and liguid metal ion source, for combination wiht a scanning electron microscope in a system of a nanofabrication and TEM semple preparation has been developed and constructed . The system makes possible fabrication of samples for TEM wiht lowest possible radiation damage and accomplish nanofabrication in one instrument. Product Description popup.authors popup.nrat_date 2020-04-02 Close