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Information × Registration Number 0209U008492, 0106U004069 , R & D reports Title Mathematical model and microelectronic production engineering of combined structures MEMS on the basis of piezoelectric diaphragmas. popup.stage_title Head Zhujkov J. Valerij, Registration Date 25-05-2009 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Design is directed on research of the combined microelectromechanical systems (MEMS-STRUCTURES) and processing techniques of membrane resonators. The model of a microelectromechanical membrane is received. Researches of physical processes of synthesis are executed at low temperatures nanostructurals films of interconnections of silicon and nitrides. Radial fluctuations piezoelectric an element with partially coated electrodes surfaces are considered. The mathematical model of radial fluctuations in the element polarized on thickness is constructed. Researches nanostructurals films on microelectronic the equipment are executed. Processes of synthesis nanostructurals films by a method high frequency-dispersion are investigated. Thin films of interconnections of silicon with high characteristics are received. The method allows to adjust industrial production of microelectronic devices MEMS. It is analysed manufacturing method of improvement electronic and physical properties of films of crystal interconnections of silicon. Results are recommended for using by design of electronic arrangements of microelectromechanical systems. Product Description popup.authors popup.nrat_date 2020-04-02 Close