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Information × Registration Number 0209U010902, 0108U007460 , R & D reports Title Development of technology introduction of ultrasonic fluctuations in the silicon plates for the formation of nanoscale hidden layers SiO2, Si3N4 and p-n junctions popup.stage_title Head Martinyuk Yakiv, Registration Date 28-12-2009 Organization National Technscal University of Ukraine "Kiev Polytechnic Institute". popup.description2 Established processes and experimental model of ultrasonic activation device of ion implantation of silicon wafers for the formation of nanoscale hidden layers of dielectrics and shallow pn junctions which makes it possible to improve the characteristics of semiconductor structures. Product Description popup.authors Божко А.П. Верба О.А Грищенко О.М. Корабльов Г.Ф. Мартинюк О.Я. Мельник В.П. Романюк Б.М. Скороход І.О. Хоменко А.М. Юрчишин В.Я. popup.nrat_date 2020-04-02 Close
R & D report
Development of technology introduction of ultrasonic fluctuations in the silicon plates for the formation of nanoscale hidden layers SiO2, Si3N4 and p-n junctions
Head: Martinyuk Yakiv. Development of technology introduction of ultrasonic fluctuations in the silicon plates for the formation of nanoscale hidden layers SiO2, Si3N4 and p-n junctions. (popup.stage: ). National Technscal University of Ukraine "Kiev Polytechnic Institute".. № 0209U010902
1 documents found

Updated: 2026-03-22


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