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Information × Registration Number 0210U000421, 0107U001240 , R & D reports Title X-ray diffraction in real crystals and multilayer nano-scaled systems popup.stage_title Head Raransky Mykola Dmytrovych, Registration Date 15-02-2010 Organization Yuri Fedkovych Chernivtsi National University popup.description2 1. The dynamical theory of X-ray scattering have been developed and corresponding model have been created with the purpose of self-consistent description of multiple coherent and diffuse X-ray scattering in structural imperfect single-crystal layers and multi-layered structures with chaotically distributed microdefects. 2. Structural changes caused by chemical etching, ion implantation and their combination were investigated in Si crystals. Methods of two- and three-crystal X-ray difractometry were used for quantitative estimation of structural changes arising in subsurface layers. Model of possible system of dominant structural defects in subsurface silicon layers modified by chemical etching and ion implantation was proposed. This model takes into account corresponding sizes and concentrations of spherical and disk-shaped cluster formations, dislocation loops as well as average parameters of porosity (radius, length and lateral quasi-period of pores) in the surface layers. 3. Using numerical solution of Takagi equations the simulation of X-ray topographical patterns of strain fields of dislocation loops, dislocation Lomer-Cottrell lock and their complexes were carried out in dependence on their localization at transition from thin to thick crystal. 4. The most probable models of dislocation loops in silicon single crystal situated in {111} planes were considered and three-dimensional functions of local misorientatios were constructed taking into account anisotropy and relaxation processes on the surface. Product Description popup.authors Балазюк Віталій Назарович Борча Мар'яна Драгошівна Довганюк Володимир Васильович Заплітний Руслан Анатолійович Литвинчук Іван Васильович Новіков Сергій Миколайович Паламарек Микола Юрійович Раранський Микола Дмитрович Федорцов Дмитро Георгійович Фодчук Ігор Михайлович popup.nrat_date 2020-04-02 Close