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Information × Registration Number 0210U001228, 0107U000441 , R & D reports Title Simulation of mass transport processes during thin films deposition by energetic particles popup.stage_title Head Kornich Grygoriy, Доктор фізико-математичних наук Registration Date 28-01-2010 Organization Zaporizhzhia National Technical University popup.description2 The goal of the work is developing of analytical diffusion-like model of a thin film deposition on a substrate with taking into account the surface and volume oxidation, molecular dynamic model for the processes of interaction of monatomic particles and low-energy clusters of different types, sizes and energies of translational motion with a solid-state surface, the study of deposition of thin films by monatomic particles and low-energy clusters using developed models. Product Description popup.authors Єрмоленко Олександр Анатолійович Кіпріч Вадим Ігорович Корніч Валерія Григорівна Корніч Григорій Володимирович Пугіна Катерина Віталіївна Шаршава Ніна Віталіївна popup.nrat_date 2020-04-02 Close