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Information × Registration Number 0210U001503, 0108U007956 , R & D reports Title Development and creating experimental sample of equipment for measuring deqree of homogenous membranes in tecnology of microelectronics popup.stage_title Head Makara Vladimir, Registration Date 22-02-2010 Organization The scintific and traning center "Physical and chemical material science" of the Kiev Taras Shevchenro Univercity and National Acad. of Sc. popup.description2 The experimental sample of equipment and method for gage thickness and refrection index and homogenous protection and active thin film structure are developed Product Description popup.authors Кепич Тіберій Юрійович Одарич Володимир Андрійович Преображенська Тамара Дмитрівна Руденко Ольга Василівна popup.nrat_date 2020-04-02 Close