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Information × Registration Number 0210U003499, 0107U002712 , R & D reports Title Design processing technique of reception functional touch MEMS on the basis of nanostructural piezoelectric films of nitride aluminium and silicon interconnections popup.stage_title Head Yakimenko I. Yuri, Registration Date 08-02-2010 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Work is directed on research of structure, physical characteristics and processing techniques of functional substances on the basis of synthesis of films of interconnections of silicon and nitrides of aluminium with low temperature. Radial fluctuations of a film element with partially coated electrodes surfaces are considered. The mathematical model of registration of fluctuations in polarized on thickness of an element is constructed. Processes of synthesis of films by a method of high frequency of dispersion are investigated. Thin films of interconnections of silicon with high characteristics are received. They have good stability. In them there are no degradations of effect Steblera-Vronski. The received films of nitrides are characterized high optical sorbtion in the field of 400 nanometers. Heterogeneous junctions have diod characteristics at low values of an electrical pressure 0,01-0,2 In in direct inclusion. The processing technique of management by structural properties of thin films of silicon with inclusions of crystal grains is developed. Electrophysical, optical, thermoelectric, photo-electric and radiating characteristics are investigated. Dependence on the sizes of crystal grains and ratios of amorphous and crystal phases is studied. Product Description popup.authors Богдан Олександр Володимирович Богдан Тетяна Зіновіївна Душейко Михайло Григорович Зеленський Сергій Васильович Кавраська Наталя Михайлівна Красонтович Михайло Юрійович Лупина Борис Іванович Орлов Анатолій Тимофійович Петрищев Олег Миколайович Чугаєв Андрій Петрович Шмирєва Олександра Миколаївна popup.nrat_date 2020-04-02 Close